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Field Emission Properties of Ion-Beam Synthesized SiC/Si Heterostructures by MEVVA Implantation

Author(s):
Chen, Dihu
Wong, S. P.
Cheung, W. Y.
Luo, E. Z.
Wu, W.
Xu, J. B.
Wilson, I. H.
Kwok, R. W. M.
3 more
Publication title:
Materials issues in vacuum microelectronics : symposium held April 13-16, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
509
Pub. Year:
1998
Page(from):
199
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994157 [1558994157]
Language:
English
Call no.:
M23500/509
Type:
Conference Proceedings

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