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EBIC Study of Fe Precipitation on Bulk Stacking Fault in Czochralski-Grown Silicon

Author(s):
Shen, B.
Sekiguchi, T.
Chen, P.
Yang, K.
Chen, Z. Z.
Zheng, Y. D.
Sumino, K.
2 more
Publication title:
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
469
Pub. Year:
1997
Page(from):
523
Pub. info.:
Pittsburg, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993730 [1558993738]
Language:
English
Call no.:
M23500/469
Type:
Conference Proceedings

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