Blank Cover Image

Point Defects, Diffusion, and Gettering in Silicon

Author(s):
Gosele, U.
Conrad, D.
Werner, P.
Tong, Q-Y.
Gafiteanu, R.
Tan, T. Y.
1 more
Publication title:
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
469
Pub. Year:
1997
Page(from):
13
Pub. info.:
Pittsburg, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993730 [1558993738]
Language:
English
Call no.:
M23500/469
Type:
Conference Proceedings

Similar Items:

Gafiteanu, R., Gosele, U., Tan, T. Y.

MRS - Materials Research Society

Goselle, U., Tan, T. Y.

Materials Research Society

Tan, T. Y.

North-Holland

3 Conference Proceedings LOW TEMPERTURE WAFER DIRECT BONDING

Q.-Y. Tong, G. Cha, R. Gafiteanu, U. Gosele

Electrochemical Society

Joshi, Subhash M., Gosele, Ulrich M., Tan, Teh Y.

MRS - Materials Research Society

G. Cha, R. Gafiteanu, Q.-Y. Tong, U. Gosele

Electrochemical Society

Gosele,U., Tan,T.Y., Uematsu,M., Wada,K.

Trans Tech Publications

Gosele, U.

Materials Research Society

11 Conference Proceedings Interface Defects of Bonded Silicon Wafers

Reiche,M., Tong,Q.-Y., Gosele,U., Heydenreich,J.

Trans Tech Publications

Tan, T.Y., Gafiteanu, R., Joshi, S.M., Goesele, U.M.

Electrochemical Society

Joshi, Subhash M., Gosele, Ulrich M., Tan, Teh Y.

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12