Defects and Diffusion Issues for the Manufacturing of Semiconductors in the 21st Century

Defects and Diffusion Issues for the Manufacturing of Semiconductors in the 21st Century

Author(s):: Plummer, J. D.
Publication title:: Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.
Title of ser.:: Materials Research Society symposium proceedings
Ser. no.:: 469
Pub. Year:: 1997
Page(from):: 3
Pub. info.:: Pittsburg, Pa.: MRS - Materials Research Society
ISSN:: 02729172
ISBN:: 9781558993730 [1558993738]
Language:: English
Call no.:: M23500/469
Type:: Conference Proceedings

Details

TDL ID:	ZA00016586
Series ID:	PA00000011
Conf. info. (Name):	Symposium on defects and diffusion in silicon processing
Conf. info. (Number):	1997
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1997.04.01-1997.04.04

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