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Residual Stress Effects on the Fracture of Tantalum Nitride Films

Author(s):
Publication title:
Interfacial engineering for optimized properties : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
458
Pub. Year:
1997
Page(from):
453
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993624 [1558993622]
Language:
English
Call no.:
M23500/458
Type:
Conference Proceedings

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