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Preparation and Characterization of SrTiO3 Thin Films Using ECR Plasma Assisted MOCVD

Author(s):
Lee, Joon Sung
Song, Han Wook
Yoon, Dae Sung
Jun, Byung Hyuk
Yu, Byoung Gon
Jiang, Zhong Tao
Lee, Won Jong
No, Kwangsoo
3 more
Publication title:
Metal-organic chemical vapor deposition of electronic ceramics II : symposium held on November 27-29 1995, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
415
Pub. Year:
1996
Page(from):
183
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993181 [1558993185]
Language:
English
Call no.:
M23500/415
Type:
Conference Proceedings

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