Advanced Interactive Personal Computer-Based Process Control Systems for Oxide MOCVD Systems
- Author(s):
Tompa, G. S. Shen, D. Zhang, C. Murzin, I. H. Gallois, B. Liang, S. Gorla, C. R. Chen, Y. - Publication title:
- Metal-organic chemical vapor deposition of electronic ceramics II : symposium held on November 27-29 1995, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 415
- Pub. Year:
- 1996
- Page(from):
- 167
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993181 [1558993185]
- Language:
- English
- Call no.:
- M23500/415
- Type:
- Conference Proceedings
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