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Improvement of PECVD-SiNx for TFT Gate Insulator by Controlling Ion Bombardment Energy

Author(s):
Kasama, Yasuhiko
Ohmi, Tadahiro
Fukuda, Koich
Fukui, Hirobumi
Iwasaki, Chisato
Ono, Shoich
1 more
Publication title:
Metal-organic chemical vapor deposition of electronic ceramics II : symposium held on November 27-29 1995, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
415
Pub. Year:
1996
Page(from):
57
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993181 [1558993185]
Language:
English
Call no.:
M23500/415
Type:
Conference Proceedings

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