Blank Cover Image

Deposition of Si Thin Films by Reactive CVD

Author(s):
Hanna, J.-I.  
Publication title:
Amorphous silicon technology, 1995 : Symposium held April 18-21, 1995, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
377
Pub. Year:
1995
Page(from):
105
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992801 [1558992804]
Language:
English
Call no.:
M23500/377
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Preparation of SiGe Crystalline Thin Films by 'Reactive Thermal CVD'

Yamamoto, M., Hanna, J.

Electrochemical Society
7 Conference Proceedings Characteristics of Bottom Gate Thin Film Transistors With Silicon Rich Poly-Si1-xGex and Poly-Si Fabricated by Reactive Thermal Chemical Vapor Deposition

Shimizu, Kousaku, Zhang, Jian Jun, Lee, Jeong-Woo, Hanna, Jun-ichi

Materials Research Society
2 Conference Proceedings Fabrication and Characteriztion of Polycrystalline Silicon Thin Films by Reactive Thermal CVD with Si_2H_6 and F_2

Lee, J.W., Shimizu, K., Hanna, J.

Materials Research Society
8 Conference Proceedings PROPAGATION OF Si-NETWORK IN HR-CVD AND SPONTANEOUS CHEMICAL DEPOSITION

Hanna, J., Kamo, A., Azuma, M., Shibata, N., Shirai, H., Shimizu, I.

Materials Research Society
3 Conference Proceedings Low-Temperature Growth of Poly-Si and SiGe Thin Films by Reactive Thermal CVD and Fabrication of High Mobility TFTs Over 50 cm2/Vs

Hanna, Jun-ichi, Shimizu, Kousaku

Materials Research Society
9 Conference Proceedings TOF and TFT mobilities in polycrystalline thin films of liquid crystalline material

H. Iino, J. Hanna

Society of Photo-optical Instrumentation Engineers
4 Conference Proceedings DEPOSITION OF TITANIUM NITRIDE THIN FILMS BY PLASMA ENCHANCED CVD AND REACTIVE SPUTTERING

Gleason, E.F., Hess, D.W.

Materials Research Society
10 Conference Proceedings REACTIVE DEPOSITION OF a-SILICON AND Si-BASED ALLOYS

Hanna, J., Oda, S., Shirai, H., Miyauchi, A., Tanabe, A., Fukuda, K., Ohtoshi, T., Tokuhiro, O., Nguyen, H., Shimizu, I.

Materials Research Society
5 Conference Proceedings PREPARATION OF Si THIN FILMS BY SPONTANEOUS CHEMICAL DEPOSITION

Hanna, J. -I., Kamo, A., Komiya, T., Nguyen, H. D., Shimizu, I., Kokado, H.

Materials Research Society
11 Conference Proceedings Low Temperature Deposition of Polycrystalline Silicon Thin Films by Hot-Wire CVD

Yu, S., Deshpande, S., Gulari, E., Kanicki, J.

MRS - Materials Research Society
6 Conference Proceedings DEPOSITION OF THIN INSULATING FILMS BY PLASMA ENHANCED CVD

Lucovsky, G., Richard, P.D., Tsu, D.V., Markunas, R.J.

Materials Research Society
12 Conference Proceedings ELECTROPHORETIC DEPOSITION OF DIAMOND MONOLAYERS FOR CVD GROWTH OF DIAMOND THIN FILMS

Valdes, J.L., Tao, B.A., Mitchell, J.W., Kammlott, G.W., Seibles, L.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12