Fabrication of Undoped and N+ Microcrystalline Si Films Using SiH2Cl2
- Author(s):
Byun, J. S. Jeon, H. B. Jun, J. M. Yoo, J. H. Lee, K. H. Park, M. Jang, J. - Publication title:
- Amorphous silicon technology, 1995 : Symposium held April 18-21, 1995, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 377
- Pub. Year:
- 1995
- Page(from):
- 75
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992801 [1558992804]
- Language:
- English
- Call no.:
- M23500/377
- Type:
- Conference Proceedings
Similar Items:
Materials Research Society |
Materials Research Society |
2
Conference Proceedings
Polycrystalline Silicon Single Electron Island by Excimer Laser Irradiation on a-Si Film
MRS - Materials Research Society |
Trans Tech Publications |
3
Conference Proceedings
Fabrication of TFA-MOD YBCO Films Using the Y2Ba1Cu1Ox and Ba3Cu5O8 Powders
Trans Tech Publications | |
Materials Research Society |
Materials Research Society |
5
Conference Proceedings
The Mechanical Properties of TiN Films Grown by a Pure N2 Plasma Sputtering
Trans Tech Publications |
SPIE - The International Society for Optical Engineering |
6
Conference Proceedings
Optical encryption of binary data information with 2-step phase-shifting digital holography
SPIE - The International Society of Optical Engineering |
Materials Research Society |