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RF AEROSOL MIST PLASMA DEPOSITION OF OXIDE FILMS

Author(s):
Williams, J. A. A.
Shen, C. Q.
Vuong, K. D.
Tenpas, E.
Condrate, R. A., Sr.
Lee, D. H.
Wang, H.
Fagan, J.
Wang, X. W.
Stuckey, J.
DeMarco, M.
Yu, W.
Petrou, A.
8 more
Publication title:
Evolution of thin film and surface structure and morphology : symposium held November 28-December 2, 1994, Boston, Massachusetts, USA
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
355
Pub. date:
1995
Page(from):
563
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992566 [1558992561]
Language:
English
Call no.:
M23500/355
Type:
Conference Proceedings

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