PULSED LASER DEPOSITION AND CHARACTERIZATION OF NOVEL Cu/TiN/Si(100) HETEROSTRUCTURES GROWN VIA DOMAIN EPITAXY

PULSED LASER DEPOSITION AND CHARACTERIZATION OF NOVEL Cu/TiN/Si(100) HETEROSTRUCTURES GROWN VIA DOMAIN EPITAXY

Author(s):

Publication title:

Evolution of thin film and surface structure and morphology : symposium held November 28-December 2, 1994, Boston, Massachusetts, USA

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

355

Pub. Year:

1995

Page(from):

39

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992566 [1558992561]

Language:

English

Call no.:

M23500/355

Type:

Conference Proceedings

Details

TDL ID:	ZA00016576
Series ID:	PA00000011
Conf. info. (Name):	Symposium on evolution of thin film and surface structure and morphology
Conf. info. (Number):	1994
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1994.11.28-1994.12.02

Similar Items:

1 Conference Proceedings Pulsed laser processing of epitaxial TiN/Si heterostructures R.D. Vispute, R. Chowdhury, J. Narayan Society of Photo-optical Instrumentation Engineers	7 Conference Proceedings MICROSTRUCTURE AND PROPERTIES OF CoSi2 THIN FILMS ON (100) SILICON BY LASER PHYSICAL VAPOR DEPOSITION Tiwari, P., Chowdhury, R., Narayan, J. Materials Research Society
2 Conference Proceedings LASER PROCESSING, CHARACTERIZATION, AND MODELING OF EPITAXIAL Si/TiN/Si (100) HETEROSTRUCTURES Chowdhury, Rina, Chen, X., Jagannadham, K., Narayan, J. Materials Research Society	8 Conference Proceedings PULSED LASER DEPOSITION OF EPITAXIAL (110) TiN FILMS ON (100) GaAs-PROCESSING, CHARACTERIZATION AND MODELING Zheleva, Tsvetanka, Jagannadham, K., Biunno, N., Narayan, J. MRS - Materials Research Society
3 Conference Proceedings EPITAXIAL GROWTH OF TITANIUM NITRIDE FILMS ON (100) SILICON THREE-DIMENSIONAL HETEROSTRUCTURES: PROCESSING AND CHARACTERIZATION Chowdhury, Rina, Biunno, N., Narayan, J. MRS - Materials Research Society	9 Conference Proceedings EPITAXIAL GROWTH OF TiN ON GaAs(100) BY PULSED LASER DEPOSITION Zheleva, Tsvetanka S., Jagannadham, K., Kumar, A., Narayan, J. Materials Research Society
4 Conference Proceedings Epitaxial TiN Films on Sapphire and Silicon-on-Sapphire by Pulsed Laser Deposition Vispute, R. D., Dovidenko, K., Jagannadham, K., Narayan, J. MRS - Materials Research Society	10 Conference Proceedings RAMAN SPECTROSCOPY OF TiN FILMS DEPOSITED ON SILICON (001) SUBSTRATE BY LASER PHYSICAL VAPOR DEPOSITION Jagannadham, K., Chowdhury, R., Biunno, N., Narayan, J. MRS - Materials Research Society
5 Conference Proceedings Growth of epitaxial Cu/TiN/6H-SiC(0001) heterostructures by pulsed laser deposition Kvit, A., Sharma, A. K., Narayan, J. MRS-Materials Research Society	11 Conference Proceedings FORMATION OF SUBMICRON SINGLE CRYSTAL PARTICLES AND DOTS BY LASER ABLATION Wu, Hong, Vispute, R. D., Narayan, J. MRS - Materials Research Society
6 Conference Proceedings Epitaxial Growth of AlN Thin Films on Silicon and Sapphire by Pulsed Laser Deposition Vispute, R. D., Wu, H., Jagannadham, K., Narayan, J. MRS - Materials Research Society	12 Conference Proceedings Pulsed Laser Deposition: A Novel Growth Technique for Wide-Bandgap Semiconductor Research Vispute, R. D., Enck, R., Patel, A., Ming, B., Sharma, R. P., Venkatesan, T., Scozzie, C. J., Lelis, A., McLean, F. B., … Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12