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PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF SILICON NITRIDE FROM NOVEL ORGANOSILANES

Author(s):
Publication title:
Materials and processes for environmental protection : symposium held April 5-7, 1994, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
344
Pub. Year:
1994
Page(from):
241
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992399 [1558992391]
Language:
English
Call no.:
M23500/344
Type:
Conference Proceedings

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