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Micrascan III:performance of a third-generation catadioptric step-and-scan lithographic tool

Author(s):
Cote,D.R. ( SVG Lithography Systems,Inc. )
Andresen,K.W.
Cronin,D.J.
Harrold,H.
Himel,M.D.
Kane,J.
Lyons,J.
Markoya,L.
Mason,C.
McCafferty,D.C.
McCarthy,M.E.
O'Connor,G.
Sewell,H.
Williamson,D.
9 more
Publication title:
Optical Microlithography X
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3051
Pub. Year:
1997
Page(from):
806
Page(to):
816
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424655 [081942465X]
Language:
English
Call no.:
P63600/3051
Type:
Conference Proceedings

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