Optical proximity correction of alternating phase-shift masks for 0.18-ヲフm KrF lithography
- Author(s):
- Yasuzato,T. ( NEC Corp. )
- Ishida,S.
- Shioiri,S.
- Tanabe,H.
- Kasama,K.
- Publication title:
- Optical Microlithography X
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3051
- Pub. Year:
- 1997
- Page(from):
- 751
- Page(to):
- 762
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819424655 [081942465X]
- Language:
- English
- Call no.:
- P63600/3051
- Type:
- Conference Proceedings
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