Blank Cover Image

Fast modeling of 3D planar resist images for high-NA projection lithography

Author(s):
Ivin,V.V. ( SOFT-TEC )
Larin,D.Yu.
Lucas,K.D.
Makhviladze,T.M.
Rogov,A.A.
Verzunov,S.V.
1 more
Publication title:
Optical Microlithography X
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3051
Pub. Year:
1997
Page(from):
567
Page(to):
577
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424655 [081942465X]
Language:
English
Call no.:
P63600/3051
Type:
Conference Proceedings

Similar Items:

Lucas,K.D., Ivin,V.V., Kudrja,V.P., Larin,D.Yu., Makhviladze,T.M., Medvedeva,M.G., Rogov,A.A., Verzunov,S.V., Yang,D.C.

SPIE-The International Society for Optical Engineering

K.D. Lucas, A.J. Strojwas, H. Tanabe

Society of Photo-optical Instrumentation Engineers

Ivin,V.V., Lucas,K.D., Makhviladze,T.M., Manuilov,V.V., Medvedeva,M.G

SPIE-The International Society for Optical Engineering

Postnikov,S.V., Lucas,K.D., Roman,B.J., Wimmer,K.

SPIE - The International Society for Optical Engineering

Postnikov, S.V., Lucas, K., Wimmer, K., Ivin, V., Rogov, A.

SPIE-The International Society for Optical Engineering

Zimnyakov,D.A., Larin,K.V., Tuchin,V.V.

SPIE-The International Society for Optical Engineering

Babin,S.V., Kozunov,V.V., Kuzmin,I.Yu.

SPIE-The International Society for Optical Engineering

Matsumiya, T., Ando, T., Yoshida, M., Ishikawa, K., Shimizu, S.

SPIE - The International Society of Optical Engineering

Larin,K.V., Zimnyakov,D.A., Mishin,A.A., Tuchin,V.V.

SPIE-The International Society for Optical Engineering

Zimnyakov,D.A., Tuchin,V.V., Mishin,A.A., Larin,K.V.

SPIE-The International Society for Optical Engineering

Golovko, A.A., Golubeva, E.M., Grechnev, V.V., Myachin, D.Yu., Trifonov, V.D., Khlystova, A.l.

ESA Publications Division

Zimnyakov,D.A., Tuchin,V.V., Larin,K.V., Mishin,A.A.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12