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Fast modeling of 3D planar resist images for high-NA projection lithography

Author(s):
Ivin,V.V. ( SOFT-TEC )
Larin,D.Yu.
Lucas,K.D.
Makhviladze,T.M.
Rogov,A.A.
Verzunov,S.V.
1 more
Publication title:
Optical Microlithography X
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3051
Pub. date:
1997
Page(from):
567
Page(to):
577
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424655 [081942465X]
Language:
English
Call no.:
P63600/3051
Type:
Conference Proceedings

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