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Development of a two-sided piezoelectric rotary ultrasonic motor for high torque

Author(s):
Publication title:
Smart structures and materials 1997 : smart structures and integrated systems : 3-6 March 1997, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3041
Pub. Year:
1997
Page(from):
326
Page(to):
338
Pub. info.:
Bellingham, Washington: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424549 [0819424544]
Language:
English
Call no.:
P63600/3041
Type:
Conference Proceedings

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