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Pulsed laser deposition of ferroelectric thin films for active microwave electronic devices

Author(s):
Horwitz,J.S. ( Naval Research Lab. )
Chrisey,D.B.
Carter,A.C.
Chang,W.
Knauss,L.A.
Pond,J.M.
Kirchoefer,S.W.
Korn,D.
Qadri,S.B.
4 more
Publication title:
Laser Applications in Microelectronic and Optoelectronic Manufacturing II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2991
Pub. Year:
1997
Page(from):
238
Page(to):
246
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424020 [0819424021]
Language:
English
Call no.:
P63600/2991
Type:
Conference Proceedings

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