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The growth of Si1-yCy/Si and Si1-x-yGexCy/Si heterostructures by ion implantation and pulsed excimer laser-induced epitaxy

Author(s):
Fogarassy,E. ( S.de Unamuno,Lab.PHASE/CNRS )
Grob,A.
Grob,J.-J.
Muller,D.
Prevot,B.
Stuck,R.
Boher,P.
Stehle,M.X.
3 more
Publication title:
Laser Applications in Microelectronic and Optoelectronic Manufacturing II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2991
Pub. Year:
1997
Page(from):
202
Page(to):
210
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424020 [0819424021]
Language:
English
Call no.:
P63600/2991
Type:
Conference Proceedings

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