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Ablation of ceramics by UV,visible,and IR pulsed laser radiation

Author(s):
Konov,V.I. ( General Physics Institute )
Dausinger,F.
Garnov,S.V.
Klimentov,S.M.
Kononenko,T.V.
Tzarkova,O.G.
1 more
Publication title:
Laser Applications in Microelectronic and Optoelectronic Manufacturing II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2991
Pub. Year:
1997
Page(from):
151
Page(to):
160
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424020 [0819424021]
Language:
English
Call no.:
P63600/2991
Type:
Conference Proceedings

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