Blank Cover Image

Microsystem design framework based on tool adaptations and library developments

Author(s):
Publication title:
Microlithography and Metrology in Micromachining II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2880
Pub. date:
1996
Page(from):
236
Page(to):
245
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422781 [0819422789]
Language:
English
Call no.:
P63600/2880
Type:
Conference Proceedings

Similar Items:

Poppe,A., Rencz,M., Szekely,V., Karam,J.-M., Courtois,B., Hofmann,K., Glesner,M.

SPIE-The International Society for Optical Engineering

Szekely,V., Csendes,A., Rencz,M.

SPIE-The International Society for Optical Engineering

Boutamine,H., Karam,J.M., Courtois,B., Drake,P., Oudinot,J., El Tahawi,H., Cao,A., Rencz,M., Poppe,A., Szekely,V.

SPIE-The International Society for Optical Engineering

Rencz, M., Szekely, V., Poppe, A.

SPIE-The International Society for Optical Engineering

Szekely,V., Rencz,M., Poppe,A., Courtois,B.

SPIE - The International Society for Optical Engineering

9 Conference Proceedings Thermal Transient Testing

Szekely,Vladimir, Rencz,M., Courtois,B.

SPIE-The International Society for Optical Engineering

Rencz,M., Szekely,V., Poppe,A., Courtois,B.

SPIE-The International Society for Optical Engineering

Karam,J., Courtois,B., Holjo,M., Leclercq,J.L., Viktorovitch,P.

SPIE-The International Society for Optical Engineering

Szekely,V., Rencz,M., Courtois,B.

SPIE - The International Society for Optical Engineering

Rencz,M., Szekely,V., Pahi,A., Poppe,A.

SPIE - The International Society for Optical Engineering

Rencz,Marta, Farkas,G., Szekely,Vladimir, Poppe,A., Courtois,Bernard

SPIE-The International Society for Optical Engineering

Goy,J., Courtois,B., Karam,J.M., Pressecq,F.

SPIE - The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12