Measurements of fracture strength and Young's modulus of surface-micromachined polysilicon

Measurements of fracture strength and Young's modulus of surface-micromachined polysilicon

Author(s):

Read,D.T. ( National Institute of Standards and Technology )
Marshall,J.C.

Publication title:

Microlithography and Metrology in Micromachining II

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2880

Pub. Year:

1996

Page(from):

56

Page(to):

63

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819422781 [0819422789]

Language:

English

Call no.:

P63600/2880

Type:

Conference Proceedings

Details

TDL ID:	ZA00016556
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Microlithography and Metrology in Micromachining
Conf. info. (Number):	1996 : 2nd
Conf. info. (Venue):	Austin, TX, USA
Conf. info. (Date):	1996.10.14-1996.10.15

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