Combined TMAH and HF sacrificial layer etching technique for surface micromachined devices

Combined TMAH and HF sacrificial layer etching technique for surface micromachined devices

Author(s):

Lisec,T. ( Fraunhofer-Institut fur Siliziumtechnologie )
Kreutzer,M.
Wenk,B.
Wagner,B.

Publication title:

Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2639

Pub. Year:

1995

Page(from):

286

Page(to):

293

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819420053 [0819420050]

Language:

English

Call no.:

P63600/2639

Type:

Conference Proceedings

Details

TDL ID:	ZA00016532
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Micromachining and Microfabrication Process Technology
Conf. info. (Number):	1995
Conf. info. (Venue):	Austin, TX, USA
Conf. info. (Date):	1995.10.23-1995.10.24

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