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Combined TMAH and HF sacrificial layer etching technique for surface micromachined devices
- Author(s):
- Lisec,T. ( Fraunhofer-Institut fur Siliziumtechnologie )
- Kreutzer,M.
- Wenk,B.
- Wagner,B.
- Publication title:
- Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2639
- Pub. Year:
- 1995
- Page(from):
- 286
- Page(to):
- 293
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420053 [0819420050]
- Language:
- English
- Call no.:
- P63600/2639
- Type:
- Conference Proceedings
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