Novel silicon fabrication process for high-aspect-ratio micromachined parts
- Author(s):
- Fleming,J.G. ( Sandia National Labs. )
- Barron,C.C.
- Publication title:
- Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2639
- Pub. Year:
- 1995
- Page(from):
- 185
- Page(to):
- 190
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420053 [0819420050]
- Language:
- English
- Call no.:
- P63600/2639
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Fabrication of large-area gratings with submicron pitch using mold micromachining
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Simulation and optimization of a micromachined gyroscope using high-aspect-ratio micromachining fabrication process
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Materials science approach to the fabrication of 3D silicon photonic lattices(Invited Paper)
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Micromachined sensor and actuator research at the Microelectronics Development Laboratory
Society of Photo-optical Instrumentation Engineers |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
6
Conference Proceedings
Combining the best of bulk and surface micromachining using Si {111} substrates
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
Laser micromachining and nickel plating of high-aspect-ratio structures in polymer molds
SPIE-The International Society for Optical Engineering |