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Hydrogen and Nitrogen Loss during ERD Analysis of Silicon(Oxy)nitrides

Author(s):
Wallace,S.G.
Kockelkoren,A.C.
Boudreau,M.G.
Mascher,P.
Forster,J.S.
Davies,J.A.
1 more
Publication title:
Materials science applications of ion beam techniques : proceedings of the International Symposium on Materials Science Applications of Ion Beam Techniques, incoeporating the 1st German-Australian Workshop on Ion Beam Analysis, Seeheim, Germany, September 9-12 1996
Title of ser.:
Materials science forum
Ser. no.:
248-249
Pub. Year:
1997
Page(from):
381
Page(to):
384
Pub. info.:
Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878497676 [0878497676]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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