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Changes in surface characteristics of HgCdTe by dry etching

Author(s):
Song, K.H. ( Paichai University, Korea )
Yoon, T.H.
Hahn, S.R.
Kim, E.T.
Kwon, J.H.
Lee, S.G.
Hwang, T.S.
Lee, Y.S.
Kim, J.M.
4 more
Publication title:
Infrared technology and applications XXIV : 19-24 July 1998, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3436
Pub. date:
1998
Vol.:
Part 1
Page(from):
77
Page(to):
83
Pub. info.:
Bellingham, Wash., USA: SPIE
ISSN:
0277786X
ISBN:
9780819428912 [0819428914]
Language:
English
Call no.:
P63600/3436
Type:
Conference Proceedings

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