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Application of optical scatterometry to microelectronics and flat panel display processing

Author(s):
McNeil, J.R. ( University of New Mexico )
Coulombe, S.A.
Logofatu, P.C.
Raymond, Christopher J.
Naqvi, Sohail H.
Collins, G.J.
1 more
Publication title:
Scattering and surface roughness II : 21-23 July 1998, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3426
Pub. Year:
1998
Page(from):
202
Page(to):
212
Pub. info.:
Bellingham, Wash.: SPIE
ISSN:
0277786X
ISBN:
9780819428813 [0819428817]
Language:
English
Call no.:
P63600/3426
Type:
Conference Proceedings

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