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Stability of CrFx films for phase-shifting mask

Author(s):
Kim,E. ( Korea Advanced Institute of Science and Technology )
Hong,S. ( Korea Advanced Institute of Science and Technology )
Jiang,Z.-T. ( Korea Advanced Institute of Science and Technology )
Lim,S. ( Samsung Electronics Co.,Ltd.(Korea) )
Woo,S.-G. ( Samsung Electronics Co.,Ltd.(Korea) )
Koh,Y.-B. ( Samsung Electronics Co.,Ltd.(Korea) )
No,K. ( Korea Advanced Institute of Science and Technology )
2 more
Publication title:
Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3096
Pub. Year:
1997
Page(from):
294
Page(to):
297
Pub. info.:
Bellingham, Washington: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819425164 [0819425168]
Language:
English
Call no.:
P63600/3096
Type:
Conference Proceedings

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