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Excimer laser drilling of polymers

Author(s):
  • Chen,Y.H. ( Gintic Institute of Manufacturing Technology(Singapore) )
  • Zheng,H.Y. ( Gintic Institute of Manufacturing Technology(Singapore) )
  • Wong,K.S. ( Gintic Institute of Manufacturing Technology(Singapore) )
  • Tam,S.C. ( Nanyang Technological Univ.(Singapore) )
Publication title:
Microelectronic Packaging and Laser Processing
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3184
Pub. Year:
1997
Page(from):
202
Page(to):
210
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426116 [0819426113]
Language:
English
Call no.:
P63600/3184
Type:
Conference Proceedings

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