Blank Cover Image

Cleaning force in laser cleaning of silicon substrates

Author(s):
Song,W.D. ( Data Storage Institute(Singapore) )
Lu,Y.F. ( National Univ.of Singapore )
Ye,K.D. ( Data Storage Institute(Singapore) )
Tee,C.K. ( National Univ.of Singapore )
Hong,M.H. ( Data Storage Institute(Singapore) )
Liu,D.M. ( Data Storage Institute(Singapore) )
Low,T.S. ( Data Storage Institute(Singapore) )
2 more
Publication title:
Microelectronic Packaging and Laser Processing
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3184
Pub. Year:
1997
Page(from):
158
Page(to):
165
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426116 [0819426113]
Language:
English
Call no.:
P63600/3184
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Laser cleaning of magnetic disks

Song,W.D., Lu,Y.F., Hong,M.H., Low,T.S.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Science and engineering in laser surface cleaning

Lu,Y.F., Song,W.D., Hong,M.H., Ren,Z.M., Zheng,Y.W.

SPIE - The International Society for Optical Engineering
2 Conference Proceedings Audible acoustic wave real-time monitoring in laser processing of microelectronic materials

Hong,M.H., Lu,Y.F., Song,W.D., Liu,D.M., Low,T.S.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Recent Progress On The Modeling Of Laser Surface Cleaning

Lu, Y.F., Song, W.D., Lukyanchuk, B.S., Hong, M.H., Zheng, W.Y.

Materials Research Society
3 Conference Proceedings Laser applications in integrated circuit packaging

Lu, Y.F., Song, W.D., Ren, Z.M., An, C.W., Ye, K.D., Liu, D.M., Wang, W.J., Hong, M.H., Chong, T.C.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Laser Cleaning of Nanoparticles From Solid Surfaces

Lu, Y.F., Zheng, W.Y., Zhang, L., Luk'yanchuk, B., Song, W.D., Wang, W.J., Hong, M.H., Chong, T.C.

Materials Research Society
4 Conference Proceedings Excimer laser irradiation on NiP surface

Liu,D.M., Lu,Y.F., Yiang,K.Y., Song,W.D., Hong,M.H., Low,T.S.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings "Laser surface cleaning: basic understanding, engineering efforts, and technical barriers"

Lu,Y.F., Song,W.D., Hong,M.H., Ren,Z.M., Zheng,Y.W.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Laser cleaning technology and its application

Song,W.D., Hong,M.H., Zhang,L., Lu,Y.F., Chong,T.C.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Theoretical model and experimental study for dry and steam laser cleaning (Invited Paper)

Lu,Y.F., Song,W.D., Zhang,Y., Low,T.S.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Laser cleaning of microparticles:theoretical prediction of threshold laser fluence

Lu,Y.F., Song,W.D., Hong,M.H., Chan,D.S.H., Low,T.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Laser surface cleaning and real-time monitoring

Lu,Y.F., Song,W.D., Hong,H.M., Zheng,Y.W.

SPIE - The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12