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Audible acoustic wave real-time monitoring in laser processing of microelectronic materials

Author(s):
  • Hong,M.H. ( Data Storage Institute(Singapore) )
  • Lu,Y.F. ( National Univ.of Singapore )
  • Song,W.D. ( Data Storage Institute(Singapore) )
  • Liu,D.M. ( National Univ.of Singapore )
  • Low,T.S. ( Data Storage Institute(Singapore) )
Publication title:
Microelectronic Packaging and Laser Processing
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3184
Pub. Year:
1997
Page(from):
148
Page(to):
157
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426116 [0819426113]
Language:
English
Call no.:
P63600/3184
Type:
Conference Proceedings

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