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Development of the IBIC(ion-beam-induced charge)technique for IC failure-analysis

Author(s):
Osipowicz,T. ( National Univ.of Singapore )
Sanchez,J.L. ( National Univ.of Singapore )
Watt,F. ( National Univ.of Singapore )
Kolachina,S. ( National Univ.of Singapore )
Ong,V.K.S. ( National Univ.of Singapore )
Chan,D.S.H. ( National Univ.of Singapore )
Phang,J.C.H. ( National Univ.of Singapore )
2 more
Publication title:
Microelectronic Packaging and Laser Processing
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3184
Pub. Year:
1997
Page(from):
66
Page(to):
72
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426116 [0819426113]
Language:
English
Call no.:
P63600/3184
Type:
Conference Proceedings

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