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Knowledge-based software system for fast yield-loss detection in a semiconductor fab

Author(s):
Martin,V. ( Lucent Technologies Madrid (Spain) )
Recio,M. ( Lucent Technologies Madrid (Spain) )
Merino,M.A. ( Lucent Technologies Madrid (Spain) )
Moreno,J. ( Lucent Technologies Madrid (Spain) )
Fernandez,A. ( Lucent Technologies Madrid (Spain) )
Gonzalez,G. ( Lucent Technologies Madrid (Spain) )
Sanchez,G. ( Lucent Technologies Madrid (Spain) )
Barrios,L.J. ( Instituto de Automatica Industrial (Spain) )
del Castillo,M.D. ( Instituto de Automatica Industrial (Spain) )
Lemus,L. ( Instituto de Automatica Industrial (Spain) )
Gonzalez,A.L. ( Instituto de Automatica Industrial (Spain) )
6 more
Publication title:
Microelectronic Manufacturing Yield, Reliability, and Failure Analysis III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3216
Pub. Year:
1997
Page(from):
88
Page(to):
101
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426482 [0819426482]
Language:
English
Call no.:
P63600/3216
Type:
Conference Proceedings

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