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Unique case study of low-yield analysis of 1 .5-ｦﾌm BiCMOS technology

Author(s):
  • Teoh,C.S. ( National Semiconductor Sdn. Bhd. (Malaysia) )
  • Lin,J. ( National Semiconductor Corp )
Publication title:
Microelectronic Manufacturing Yield, Reliability, and Failure Analysis III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3216
Pub. Year:
1997
Page(from):
10
Page(to):
18
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426482 [0819426482]
Language:
English
Call no.:
P63600/3216
Type:
Conference Proceedings

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