SAMPLE (Sandia agile MEMS prototyping,layout tools,and education)

SAMPLE (Sandia agile MEMS prototyping,layout tools,and education)

Author(s):

Davies,B.R. ( Sandia National Labs. )
Craig Barron,C. ( Sandia National Labs. )
Sniegowski,J.J. ( Sandia National Labs. )
Rodgers,M.S. ( Sandia National Labs. )

Publication title:

Microelectronic Structures and MEMS for Optical Processing III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3226

Pub. Year:

1997

Page(from):

11

Page(to):

21

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819426581 [081942658X]

Language:

English

Call no.:

P63600/3226

Type:

Conference Proceedings

Details

TDL ID:	ZA00016459
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Microelectronic Structures and MEMS for Optical Processing
Conf. info. (Number):	1997 : 3rd
Conf. info. (Venue):	Austin, TX, USA
Conf. info. (Date):	1997.09.29-1997.09.30

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2 Conference Proceedings Advanced micromechanisms in a multilevel polysilicon technology Rodgers,m.S., Sniegowski,J.J., Miller,S.L., Craig Barron,C., McWhorter,P.J. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Thin Teflon-like films for MEMS: film properties and reliability studies Smith,B.K., Brown,C.D., LaVigne,G., Sniegowski,J.J. SPIE-The International Society for Optical Engineering
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