Fabrication of microrelief surfaces using a one-step lithography process (Invited Paper)
- Author(s):
Reimer,K. ( Fraunhofer Institut fur Siliziumtechnologie (FRG) ) Hofmann,U. ( Fraunhofer Institut fur Siliziumtechnologie (FRG) ) Jurss,M. ( Fraunhofer Institut fur Siliziumtechnologie (FRG) ) Pulz,W. ( Fraunhofer Institut fur Siliziumtechnologie (FRG) ) Quenzer,H.J. ( Fraunhofer Institut fur Siliziumtechnologie (FRG) ) Wagner,B. ( Fraunhofer Institut fur Siliziumtechnologie (FRG) ) - Publication title:
- Microelectronic Structures and MEMS for Optical Processing III
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3226
- Pub. Year:
- 1997
- Page(from):
- 2
- Page(to):
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426581 [081942658X]
- Language:
- English
- Call no.:
- P63600/3226
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Wafer-level vacuum packaged resonant micro-scanning mirrors for compact laser projection displays
Society of Photo-optical Instrumentation Engineers |
3
Conference Proceedings
Waferlevel Vacuum Packaging: Essential for Microscanners in Mobile Applications
Electrochemical Society |
9
Conference Proceedings
Characterization of errors in quantum processes using finite sets of test measurements (Invited Paper) [6305-16]
SPIE - The International Society of Optical Engineering |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
A novel fabrication technology for anti-reflex water-level vacuum packaged microscanning mirrors
Society of Photo-optical Instrumentation Engineers |
11
Conference Proceedings
(AlGaIn)N ultraviolet LED chips and their use in triphosphor luminescence conversion white LEDs(Invited Paper)
SPIE-The International Society for Optical Engineering |
6
Conference Proceedings
Progress in gray-tone lithography and replication techniques for different materials
SPIE - The International Society for Optical Engineering |
12
Conference Proceedings
Fabrication of infrared antennas using electron-beam lithography (Invited Paper)
SPIE-The International Society for Optical Engineering |