Yield,metrology,and inspection characteristics of SCALPEL masks
- Author(s):
Peabody,M.L. ( Lucent Technologies/Bell Labs. ) Blakey,M.I. ( Lucent Technologies/Bell Labs. ) Farrow,R.C. ( Lucent Technologies/Bell Labs. ) Kasica,R.J. ( Lucent Technologies/Bell Labs. ) Liddle,J.A. ( Lucent Technologies/Bell Labs. ) Novembre,A.E. ( Lucent Technologies/Bell Labs. ) Saunders,T.E. ( Lucent Technologies/Bell Labs. ) Tennant,D.M. ( Lucent Technologies/Bell Labs. ) Windt,D.L. ( Lucent Technologies/Bell Labs. ) - Publication title:
- 17th Annual BACUS Symposium on Photomask Technology and Management
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3236
- Pub. Year:
- 1998
- Page(from):
- 190
- Page(to):
- 194
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426697 [0819426695]
- Language:
- English
- Call no.:
- P63600/3236
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
2
Conference Proceedings
Defect inspection and linewidth measurement of SCALPEL thin membrane masks using optical transmission
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Cleaning of SCALPEL next-generation Lithography masks using PLASMAX,a revolutionary dry cleaning technology
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |