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Optical study of the influence of oxygen on the synthesis of SiC-buried layer in Cz-Si and Fz-Si

Author(s):
  • Yukhimchuk,V.A. ( Institute of Semiconductor Physics (Ukraine) )
  • Melnik,V.P. ( Institute of Semiconductor Physics (Ukraine) )
  • Romanjuk,B.N. ( Institute of Semiconductor Physics (Ukraine) )
  • Popov,V.G. ( Institute of Semiconductor Physics (Ukraine) )
  • Klyui,N.I. ( Institute of Semiconductor Physics (Ukraine) )
Publication title:
International Conference on Optical Diagnosis of Materials and Devices for Opto-, Micro-, and Quantum Electronics : 13-15 May 1997, Kiev, Ukraine
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3359
Pub. Year:
1998
Page(from):
375
Page(to):
378
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819428080 [0819428086]
Language:
English
Call no.:
P63600/3359
Type:
Conference Proceedings

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