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Optical characterization of carbon ion implantation into Si and SiGe alloys (Invited Paper)

Author(s):
Perez-Rodriguez,A. ( Univ.de Barcelona (Spain) )
Romano-Rodriguez,A. ( Univ.de Barcelona (Spain) )
Serre,C. ( Univ.de Barcelona (Spain) )
Calvo-Barrio,L. ( Univ.de Barcelona (Spain) )
Gonzalez-Varona,O. ( Univ.de Barcelona (Spain) )
Morante,J.R. ( Univ.de Barcelona (Spain) )
1 more
Publication title:
International Conference on Optical Diagnosis of Materials and Devices for Opto-, Micro-, and Quantum Electronics : 13-15 May 1997, Kiev, Ukraine
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3359
Pub. Year:
1998
Page(from):
324
Page(to):
333
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819428080 [0819428086]
Language:
English
Call no.:
P63600/3359
Type:
Conference Proceedings

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