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Experimental verification of a new physically based low-energy (<5 keV) ion implant model

Author(s):
Obradovic,B.J. ( Univ.of Texas at Austin )
Morris,S.J. ( Univ.of Texas at Austin )
Morris,M.F. ( Univ.of Texas at Austin )
Tian,S. ( Univ.of Texas at Austin )
Wang,G. ( Univ.of Texas at Austin )
Beardmore,K. ( Los Alamos National Lab. )
Snell,C.M. ( Los Alamos National Lab. )
Jackson,J. ( Eaton Corp. )
Baumann,S. ( Evans Texas )
Tasch,A.F. ( Univ.of Texas at Austin )
5 more
Publication title:
Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3506
Pub. Year:
1998
Page(from):
301
Page(to):
312
Pub. info.:
Bellingham, Washington: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429650 [0819429651]
Language:
English
Call no.:
P63600/3506
Type:
Conference Proceedings

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