Blank Cover Image

Response-surface-based optimization of 0.1-ヲフm PMOSFETs with ultrathin gate stack dielectrics

Author(s):
Publication title:
Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3506
Pub. date:
1998
Page(from):
253
Page(to):
264
Pub. info.:
Bellingham, Washington: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429650 [0819429651]
Language:
English
Call no.:
P63600/3506
Type:
Conference Proceedings

Similar Items:

Srivastava, A., Heinisch, H. H., Vogel, E., Parker, C., Osburn, C. M., Masnari, N. A., Wortman, J. J., Hauser, J. R.

MRS - Materials Research Society

Roy,P.K., Chacon,C.M., Ma,Y., Homer,C.S.

SPIE-The International Society for Optical Engineering

Srivastava, A., Osburn, C.M., Yee, K.F., Heinisch, H.H., Vogel, E.M, Abmed, K.Z., Wang, Z., Min, K., TimberJoke, B., …

Electrochemical Society

8 Conference Proceedings 0.1ヲフm Technology and BEOL

Ning, Tak H.

MRS - Materials Research Society

Sun,J.J., Tsai,J.-Y., Yee,K.F., Osburn,C.M.

SPIE-The International Society for Optical Engineering

Zhang, K.X., Osburn, C.M., Hames, G., Parker, C., Bayoumi, A.

Electrochemical Society

Tsai, Jiunn-Yann, Osburn, Carlton M., Hsia, Steve L.

MRS - Materials Research Society

Osman,M.A., Osman,A.A.

SPIE-The International Society for Optical Engineering

Murtaza,S.S., Hu,J.C., Unnikrishnan,S., Rodder,M., Chen,I.-C.

SPIE-The International Society for Optical Engineering

Masu,K., Yokoyama,M., Tsubouchi,K.

SPIE-The International Society for Optical Engineering

Hu, C-K., Lee, K. Y., Gignac, L., Rossnagel, S. M., Uzoh, C., Chan, K., Roper, P., Harper, J. M. E.

MRS - Materials Research Society

Gotlinsky,B., Beach,J.V., Mesawich,M.

SPIE - The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12