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Self-aligned silicide process technology for sub-0.25-ヲフm geometries

Author(s):
White,T.R. ( Motorola )
Kolar,D. ( Motorola )
Jahanbani,M. ( Motorola )
Frisa,L.E. ( Motorola )
Nagabushnam,R. ( Motorola )
Chuang,H. ( Motorola )
Tsui,P. ( Motorola )
Cope,J. ( Motorola )
Pulvirent,L. ( Motorola )
Bolton,S. ( Motorola )
5 more
Publication title:
Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3506
Pub. date:
1998
Page(from):
112
Page(to):
119
Pub. info.:
Bellingham, Washington: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429650 [0819429651]
Language:
English
Call no.:
P63600/3506
Type:
Conference Proceedings

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