FRAM technologies compatible with 0.5-ｦﾌm CMOS logics (Invited Paper)

FRAM technologies compatible with 0.5-ｦﾌm CMOS logics (Invited Paper)

Author(s):

Furumura,Y. ( Fujitsu Ltd. (Japan) )

Yamazaki,T. ( Fujitsu Ltd. (Japan) )

Nakamura,M. ( Fujitsu Ltd. (Japan) )

Inoue,K. ( Fujitsu Ltd. (Japan) )

Miyazawa,H. ( Fujitsu Ltd. (Japan) )

Sashida,N. ( Fujitsu Ltd. (Japan) )

Satomi,R. ( Fujitsu Ltd. (Japan) )

Katoh,Y. ( Fujitsu Ltd. (Japan) )

Ozawa,S. ( Fujitsu Ltd. (Japan) )

Takai,K. ( Fujitsu Ltd. (Japan) )

Noshiro,H. ( Fujitsu Ltd. (Japan) )

Shinohara,R. ( Fujitsu Ltd. (Japan) )

Obata,V. ( Fujitsu Ltd. (Japan) )

Kerry,A. ( Fujitsu Ltd. (Japan) )

Tani,K. ( Fujitsu Ltd. (Japan) )

Nakashima,S. ( Fujitsu Ltd. (Japan) )

Nakajima,T. ( Fujitsu Ltd. (Japan) )

Imal,M. ( Fujitsu Ltd. (Japan) )

Takesima,T. ( Fujitsu Ltd. (Japan) )

Teramoto,T. ( Fujitsu Ltd. (Japan) )

15 more

Publication title:

Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3506

Pub. Year:

1998

Page(from):

56

Page(to):

64

Pub. info.:

Bellingham, Washington: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819429650 [0819429651]

Language:

English

Call no.:

P63600/3506

Type:

Conference Proceedings

Details

TDL ID:	ZA00016438
Series ID:	PA00000029
Conf. info. (Name):	Microelectronic Manufacturing : Microelectronic device technology
Conf. info. (Number):	1998 : 2nd
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	1998.09.23-1998.09.24

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