Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia. pp.212-220, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia. pp.364-371, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Smart materials, structures, and integrated systems : 11-13 December 1997, Adelaide, Australia. pp.382-388, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Advanced photonic sensors and applications : 30 November-3 December 1999, Singapore. pp.700-707, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Smart materials, structures, and integrated systems : 11-13 December 1997, Adelaide, Australia. pp.486-492, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering