Knowlton, W. B. ; Walton, J. T. ; Wong, Y. K. ; Mason, I. A. ; Haller, E. E.
出版情報:
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.77-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Giese, A. ; Bracht, H. ; Walton, J. T. ; Stolwijk, N. A.
出版情報:
Diffusion mechanisms in crystalline materials : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.395-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Giese, A. ; Bracht, H. ; Walton, J. T. ; Stolwijk, N. A.
出版情報:
Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.219-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Walton, J. T. ; Amman, M. ; Conti, G. ; Hong, W. S. ; Luke, P. N. ; Ziemba, F. P.
出版情報:
Amorphous and microcrystalline silicon technology - 1998 : symposium held April 14-17, 1998, San Francisco, California, U.S.A.. pp.351-, 1999. Warrendale. MRS - Materials Research Society