Design and test of a differential scanning stage system for a x-ray nanoprobe instrument (Invited Paper) [5877-14]
- 著者名:
Shu, D. Maser, J. Halt, M. Lai, B. Vogt. S. Wang, Y. Preissner, C. ( Argonne National Lab (USA); ) Han, Y. ( Argonne National Lab. (USA) and Illinois Institute of Technology (USA); ) B. Tieman, Winarski, R. ( Argonne National Lab. (USA); ) Smalyanitskiy, A ( Argonne National Lab. (USA) and Illinois Institute of Technology (USA); ) Stephenson, G. B. ( Argonne National Lab. (USA) ) - 掲載資料名:
- Optomechanics 2005 : 3-4 August 2005, San Diego, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5877
- 発行年:
- 2005
- 開始ページ:
- 58770E
- 出版情報:
- Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819458827 [0819458821]
- 言語:
- 英語
- 請求記号:
- P63600/5877
- 資料種別:
- 国際会議録
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