Emorhokpor, E. ; Carlson, E. ; Wan, J. ; Weber, A. ; Basceri, C. ; Jenny, J.R. ; Sandhu, R. ; Oliver, J.D. ; Burkeen, F. ; Somanchi, A. ; Velidandla, V. ; Orazio, F. ; Blew, A. ; Goorsky, M.S. ; Dudley, M.
出版情報:
Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005. pp.443-446, 2006. Stafa-Zuerich. Trans Tech Publications
Hansen, D.A. ; Wu, C. ; Lu, H.B. ; Oyumi, M. ; Velidandla, V.
出版情報:
Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing. pp.37-51, 1998. Pennington, N. J.. Electrochemical Society
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.540-547, 2003. Pennington, NJ. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.540-547, 2003. Pennington, NJ. Electrochemical Society
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