deBokx, P.K. ; Kidd, S.J. ; Wiener, G. ; Urbach, H.P. ; De Gendt, S. ; Mertens, P.W. ; Heyns, M.M.
出版情報:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.1511-1523, 1998. Pennington, NJ. Electrochemical Society