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Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.453-467, 1998. Pennington, NJ. Electrochemical Society
Kelly, G. P. ; Hourai, M. ; Umeno, S. ; Sano, M. ; Tsuya, H.
出版情報:
Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A.. pp.21-, 1998. Warrendale, Pa. MRS - Materials Research Society
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.517-527, 2002. Pennington, NJ. Electrochemical Society
Hourai, M. ; Ono, T. ; Umeno, S. ; Tanaka, T. ; Asayaoia, E. ; Nishikawa, H. ; Sano, M. ; Tsuya, H.
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Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany. pp.19-34, 2001. Pennington, N.J.. Electrochemical Society
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