Tanigawa, S. ; Tabuki, Y. ; Wei, L. ; Hinode, K. ; Kobayashi, N. ; Onail, T. ; Owada, N.
出版情報:
Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.307-312, 1992. Pittsburgh, Pa.. Materials Research Society
Kitano, T. ; Wei, L. ; Tabuki, Y. ; Tanigawa, S. ; Mikoshiba, H.
出版情報:
Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.707-712, 1992. Pittsburgh, Pa.. Materials Research Society
Kametani, H. ; Akiyama, H. ; Yamaguchi, Y. ; Koumaru, M, ; Wei, L. ; Tabuki, Y. ; Tanigawa, S. ; Uedono, A. ; Watauchi, S. ; Ujihira, Y. ; Suzuki, R. ; Ohgaki, H. ; Mikado, T.
出版情報:
Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.235-240, 1992. Pittsburgh, Pa.. Materials Research Society
Nagai, R. ; Takera, E. ; Tabuki, Y. ; Wei, L. ; Tanigawa, S
出版情報:
Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.283-288, 1992. Pittsburgh, Pa.. Materials Research Society